THEORETICAL-ANALYSIS OF THE ELECTRODE SHEATH IN RF DISCHARGES

[1] Bohm D., 1949, CHARACTERISTICS ELEC, pp 77

[2] PLASMA SHEATH FORMATION BY RADIO-FREQUENCY FIELDS [J]. PHYSICS OF FLUIDS, 1963, 6 (09) : 1346 - 1355

[3] Chapman B., 1980, GLOW DISCHARGE PROCE

[4] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 4965 - 4971

[5] Ecker G., 1987, Experimentelle Technik der Physik, V35, P119

[6] FLEMMINGS MC, 1985, PLASMA PROCESSING MA

[7] NOTES ON EFFECT OF NOISE ON LANGMUIR PROBE CHARACTERISTICS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (509): : 535 - &

[8] Godyak V. A, 1986, SOVIET RADIO FREQUEN

[9] GODYAK VA, 1980, SOV J PLASMA PHYS, V6, P372

[10] APPLICATION OF RF DISCHARGES TO SPUTTERING [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 168 - &

[1] Bohm D., 1949, CHARACTERISTICS ELEC, pp 77

[2] PLASMA SHEATH FORMATION BY RADIO-FREQUENCY FIELDS [J]. PHYSICS OF FLUIDS, 1963, 6 (09) : 1346 - 1355

[3] Chapman B., 1980, GLOW DISCHARGE PROCE

[4] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 4965 - 4971

[5] Ecker G., 1987, Experimentelle Technik der Physik, V35, P119

[6] FLEMMINGS MC, 1985, PLASMA PROCESSING MA

[7] NOTES ON EFFECT OF NOISE ON LANGMUIR PROBE CHARACTERISTICS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (509): : 535 - &

[8] Godyak V. A, 1986, SOVIET RADIO FREQUEN

[9] GODYAK VA, 1980, SOV J PLASMA PHYS, V6, P372

[10] APPLICATION OF RF DISCHARGES TO SPUTTERING [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) : 168 - &