ULTRAHIGH-VACUUM ARC METHOD TO FORM THIN REFRACTORY-METAL FILMS

被引：2

作者：

KANAYAMA, M ^{[1
]}

IGARASHI, Y ^{[1
]}

机构：

[1] TOHOKU UNIV, DEPT ENGN SCI, SENDAI, MIYAGI 980, JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1983年 / 54卷 / 02期

关键词：

D O I：

10.1063/1.1137349

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：220 / 225

页数：6

共 25 条

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