SOLID-PHASE EPITAXY OF TI-IMPLANTED LINBO3

被引：12

作者：

POKER, DB

THOMAS, DK

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 02期

关键词：

D O I：

10.1557/JMR.1989.0412

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：412 / 416

页数：5

共 15 条

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