共 182 条
[1]
Anderson R. C., 1991, TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), P747, DOI 10.1109/SENSOR.1991.148991
[2]
ANDERSON RC, 1990, SENSOR ACTUAT A-PHYS, V23, P835
[4]
ANDERSON RC, 1989, 5TH P INT C SOL STAT
[5]
ANDERSON RM, 1975, 33RD P ANN EL MICR S, P88
[7]
THERMAL-BEHAVIOR OF POROUS SILICON
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS,
1976, 15 (09)
:1655-1664
[8]
STRAIN IN POROUS SI FORMED ON A SI (100) SUBSTRATE
[J].
APPLIED PHYSICS LETTERS,
1990, 57 (21)
:2247-2249