CALCULATION OF SUBSTITUTIONAL IMPURITY DISTRIBUTION BY DISSOCIATIVE MECHANISM

被引:1
作者
MOROOKA, M [1 ]
YOSHIDA, M [1 ]
机构
[1] KYUSHU INST DESIGN,MINAMI KU,FUKUOKA 815,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 10期
关键词
D O I
10.1143/JJAP.21.1409
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1409 / 1411
页数:3
相关论文
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