POLYMERS OF ALPHA-SUBSTITUTED BENZYL METHACRYLATES AS A NEW TYPE OF ELECTRON-BEAM RESIST

被引:14
作者
HATADA, K [1 ]
KITAYAMA, T [1 ]
DANJO, S [1 ]
TSUBOKURA, Y [1 ]
YUKI, H [1 ]
MORIWAKI, K [1 ]
ARITOME, H [1 ]
NAMBA, S [1 ]
机构
[1] OSAKA UNIV,FAC ENGN SCI,DEPT ELECT ENGN,TOYONAKA,OSAKA 560,JAPAN
关键词
D O I
10.1007/BF00263237
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
引用
收藏
页码:45 / 50
页数:6
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