X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF THE SURFACE OF SPUTTER ION PLATED FILMS

被引：143

作者：

ROBINSON, KS

SHERWOOD, PMA

机构：

[1] Univ of Newcastle-upon-Tyne, Dep of, Inorganic Chemistry,, Newcastle-upon-Tyne, Engl, Univ of Newcastle-upon-Tyne, Dep of Inorganic Chemistry, Newcastle-upon-Tyne, Engl

来源：

SURFACE AND INTERFACE ANALYSIS | 1984年 / 6卷 / 06期

关键词：

SPECTROSCOPY; X-RAY - Thin Films;

D O I：

10.1002/sia.740060603

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

X-ray photoelectron spectroscopic analysis of a reactively sputter ion plated titanium nitride film showed the surface to be oxidized to TiO//2, with a sub-layer of oxynitride. Argon ion etching gave a depth profile of the film, but it preferentially sputtered titanium nitride, and caused mixing of TiO//2 and TiN phases to form titanium oxynitrides. Titanium oxynitride was also produced by nitrogen ion implantation into titanium metal with a surface layer of titanium dioxide.

引用

页码：261 / 266

页数：6

共 14 条

[1] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF ELECTRODE SURFACES USING A NEW CONTROLLED TRANSFER TECHNIQUE .2. RESULTS FOR A MOLYBDENUM ELECTRODE AND THE CURVE FITTING PROCEDURE
ANSELL, RO
DICKINSON, T
POVEY, AF
SHERWOOD, PMA
[J]. JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1979, 98 (01): : 79 - 89
[2] AUGER AND X-RAY CHARACTERIZATION OF SURFACE NITRIDE FILMS ON TI, ZR, AND HF
DAWSON, PT
STAZYK, SAJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 36 - 41
[3] GLASSON DR, 1969, J APPL CHEM, V19, P182
[4] CHARGE-TRANSFER SHAKE-UP SATELLITES IN X-RAY PHOTOELECTRON-SPECTRA OF CATIONS AND ANIONS OF SRTIO3, TIO2 AND SC2O3
KIM, KS
WINOGRAD, N
[J]. CHEMICAL PHYSICS LETTERS, 1975, 31 (02) : 312 - 317
[5] DETECTION OF SILICON-OXYNITRIDE LAYERS ON SURFACE OF SILICON-NITRIDE FILMS BY AUGER ELECTRON EMISSION
MAGUIRE, HG
AUGUSTUS, PD
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) : 791 - &
[6] MARTENSSON N, 1981, J PHYS F MET PHYS, V11, P1727
[7] SMOOTHING OF DIGITAL X-RAY PHOTOELECTRON-SPECTRA BY AN EXTENDED SLIDING LEAST-SQUARES APPROACH
PROCTOR, A
SHERWOOD, PMA
[J]. ANALYTICAL CHEMISTRY, 1980, 52 (14) : 2315 - 2321
[8] DATA-ANALYSIS TECHNIQUES IN X-RAY PHOTO-ELECTRON SPECTROSCOPY
PROCTOR, A
SHERWOOD, PMA
[J]. ANALYTICAL CHEMISTRY, 1982, 54 (01) : 13 - 19
[9] Sherwood P.M.A., 1983, PRACTICAL SURFACE AN, P445
[10] SHULGA YM, 1979, POROSHK METALL, V10, P1

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