WORK-FUNCTION OSCILLATIONS DURING CU FILM GROWTH ON AN OXYGEN PRECOVERED RU(0001) SURFACE - A BASICALLY OLD TECHNIQUE AS A POWERFUL FILM GROWTH MONITOR

被引:15
作者
SCHMIDT, M
WOLTER, H
NOHLEN, M
WANDELT, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 04期
关键词
D O I
10.1116/1.579011
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the present work it is demonstrated how dynamical measurements of the work function may be used to investigate the growth of thin epitaxial metal films. A special setup of a basically old technique-a redesign of a Kelvin probe-is applied to monitor work function changes not only during gas adsorption but also during metal deposition with high precision. Such dynamical work function change measurements clearly demonstrate the layer-wise growth of thin Cu films on an oxygen precovered Ru(0001) surface. This is revealed by the observation of multiple DELTAPHI-oscillations with a period corresponding to the deposition of a single Cu(111) layer. Furthermore the role of the oxygen as a surfactant for layer-by-layer growth is concluded from the fact that under similar conditions such oscillations have never been observed during Cu evaporation on the clean Ru(0001).
引用
收藏
页码:1818 / 1824
页数:7
相关论文
共 15 条
[1]   PIEZOELECTRIC DRIVEN KELVIN PROBE FOR CONTACT POTENTIAL DIFFERENCE STUDIES [J].
BESOCKE, K ;
BERGER, S .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1976, 47 (07) :840-842
[2]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[3]   ORIGIN OF OXYGEN-INDUCED LAYER-BY-LAYER GROWTH IN HOMOEPITAXY ON PT(111) [J].
ESCH, S ;
HOHAGE, M ;
MICHELY, T ;
COMSA, G .
PHYSICAL REVIEW LETTERS, 1994, 72 (04) :518-521
[4]   NEW EXPERIMENTS OF THE ADSORPTION OF NI ON NI(111) [J].
HOLZL, J ;
PORSCH, G ;
SCHRAMMEN, P .
SURFACE SCIENCE, 1980, 97 (2-3) :529-536
[5]  
HORNVONHOEGEN M, 1993, SURF SCI, V284, P53, DOI 10.1016/0039-6028(93)90524-N
[6]  
KALKI K, IN PRESS THIN SOLID
[8]  
Poelsema B., 1989, SPRINGER TRACTS MODE, V115
[9]   COMPRESSION PHASES IN COPPER-OXYGEN COADSORPTION LAYERS ON A RU(0001) SURFACE [J].
SCHMIDT, M ;
WOLTER, H ;
SCHICK, M ;
KALKI, K ;
WANDELT, K .
SURFACE SCIENCE, 1993, 287 :983-987
[10]  
SCHMIDT M, IN PRESS SURF SCI