SENSITIVITY OF HOT CATHODE IONIZATION GAUGES

被引：33

作者：

TILFORD, CR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.572991

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：546 / 550

页数：5

共 14 条

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[9] PERFORMANCE-CHARACTERISTICS OF A BROAD RANGE IONIZATION GAUGE TUBE [J].

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[10]

TILFORD CR, 1983, J VAC SCI TECHNOL A, V1, P152, DOI 10.1116/1.572063

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