CALIBRATION OF MOLECULAR DRAG VACUUM GAUGES

被引：18

作者：

MCCULLOH, KE ^{[1
]}

机构：

[1] NBS,INST BASIC STAND,WASHINGTON,DC 20234

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572065

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：168 / 171

页数：4

共 9 条

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[2] CALIBRATION OF A SPINNING ROTOR GAS FRICTION GAUGE AGAINST A FUNDAMENTAL VACUUM PRESSURE STANDARD
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MESSER, G
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (02): : 642 - 644
[3] COMSA G, 1977, 7TH P INT VAC C VIEN, V1, P157
[4] HIGH-VACUUM GAS FRICTION MANOMETER
FREMEREY, JK
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 108 - &
[5] MESSER G, COMMUNICATION
[6] MESSER G, 1980, 8TH P INT VAC C CANN, V2, P191
[7] CALIBRATION OF VACUUM GAUGES
POULTER, KF
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (02): : 112 - 125
[8] TILFORD CR, UNPUB J VAC SCI TE A
[9] MASS FLOW THROUGH A CIRCULAR ORIFICE AND A 2-DIMENSIONAL SLIT AT HIGH KNUDSEN NUMBERS
WILLIS, DR
[J]. JOURNAL OF FLUID MECHANICS, 1965, 21 : 21 - &