TEXTURAL CHARACTERISTICS AND ELECTRICAL PROPERTIES OF VACUUM EVAPORATED SILICON FILMS

被引：19

作者：

MOUNTVAL.AJ

ABOWITZ, G

机构：

来源：

VACUUM | 1965年 / 15卷 / 07期

关键词：

D O I：

10.1016/0042-207X(65)91085-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：359 / &

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