RESONANT PHASE-SHIFT TECHNIQUE FOR THE MEASUREMENT OF SMALL CHANGES IN GROUNDED CAPACITORS

A simple technique has been developed for the high resolution measurement of small changes in capacitors which have one grounded electrode. The capacitor is arranged to be the tuning element in a series resonant LC tank circuit that is driven by a transistor emitter follower. Signal information is provided by observing the phase shift in the transistor collector current that results from any small change in the capacitor value. Implementation is simple, readily analyzable, provides good diagnostics, is easily multiplexed into arrays, and has potential applications in a number of areas including high resolution proximity sensing, capacitive topography, atomic force microscopy, and capacitor microphones.