AEROSOL DOPING OF FLAME-GROWN DIAMOND FILMS

被引:6
作者
DOVERSPIKE, K [1 ]
BUTLER, JE [1 ]
FREITAS, JA [1 ]
机构
[1] SACHS FREEMAN ASSOCIATES INC,LANDOVER,MD 20785
关键词
D O I
10.1016/0925-9635(93)90276-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films have been deposited using a pre-mixed oxy-acetylene flame onto cooled substrates. Doping of these flame-grown diamond films was achieved by introducing aerosol droplets containing the dopant species into the gas flow. The aerosol was generated by a commercial atomizer and was entrained into the oxygen flow before the flame front leading to a uniform and reproducible flame. Micro-Raman measurements show a decrease in the background fluorescence of the boron-doped films as compared with samples containing other dopants. In addition, low-temperature photoluminescence measurements of both the boron- and silicon-doped films show a significant decrease in the defect bands associated with nitrogen vacancy complexes that are often observed in flame-grown diamond films. The boron-doped diamond samples were also characterized by photoluminescence using the UV 351 nm laser line of an argon ion laser and show both green and/or blue emission.
引用
收藏
页码:1078 / 1082
页数:5
相关论文
共 27 条
[11]   PHOTOLUMINESCENCE STUDIES OF POLYCRYSTALLINE DIAMOND FILMS [J].
FREITAS, JA ;
BUTLER, JE ;
STROM, U .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2502-2506
[12]  
FREITAS JA, 1991, MATER RES SOC S P, V242, P139
[13]  
FREITAS JA, 1990, 2ND P INT C NEW DIAM, P273
[14]   DIAMOND AND NON-DIAMOND CARBON SYNTHESIS IN AN OXYGEN ACETYLENE FLAME [J].
HANSSEN, LM ;
SNAIL, KA ;
CARRINGTON, WA ;
BUTLER, JE ;
KELLOGG, S ;
OAKES, DB .
THIN SOLID FILMS, 1991, 196 (02) :271-281
[15]   DIAMOND SYNTHESIS USING AN OXYGEN-ACETYLENE TORCH [J].
HANSSEN, LM ;
CARRINGTON, WA ;
BUTLER, JE ;
SNAIL, KA .
MATERIALS LETTERS, 1988, 7 (7-8) :289-292
[16]  
HIROSE Y, 1988, 1988 JAP APPL PHYS S, P95
[17]  
Hirose Y., 1988, 1ST P INT C NEW DIAM, P51
[18]   AN EXPERIMENTAL AND THEORETICAL INVESTIGATION OF FLAME-FORMED DIAMONDS [J].
KOSKY, PG ;
MCATEE, DS .
MATERIALS LETTERS, 1989, 8 (09) :369-374
[19]   MATERIAL AND ELECTRICAL CHARACTERIZATION OF POLYCRYSTALLINE BORON-DOPED DIAMOND FILMS GROWN BY MICROWAVE PLASMA CHEMICAL VAPOR-DEPOSITION [J].
NISHIMURA, K ;
DAS, K ;
GLASS, JT .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (05) :3142-3148
[20]   DIAMOND SYNTHESIS IN OXYGEN-ACETYLENE FLAMES - INHOMOGENEITIES AND THE EFFECTS OF HYDROGEN ADDITION [J].
OAKES, DB ;
BUTLER, JE ;
SNAIL, KA ;
CARRINGTON, WA ;
HANSSEN, LM .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (04) :2602-2610