CONTACT DAMAGE IN SINGLE-CRYSTALLINE SILICON INVESTIGATED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY

被引：30

作者：

JOHANSSON, S

SCHWEITZ, JA

机构：

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1988年 / 71卷 / 08期

关键词：

D O I：

10.1111/j.1151-2916.1988.tb06378.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：617 / 623

页数：7

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