MULTIPULSE LASER NITRIDATION OF TITANIUM, ZIRCONIUM AND HAFNIUM IN A NITROGEN ATMOSPHERE CONTAINING OXYGEN

被引：19

作者：

URSU, I ^{[1
]}

MIHAILESCU, IN ^{[1
]}

NISTOR, LC ^{[1
]}

TEODORESCU, VS ^{[1
]}

PROKHOROV, AM ^{[1
]}

KONOV, VI ^{[1
]}

UGLOV, SA ^{[1
]}

机构：

[1] MOSCOW GEN PHYS INST,MOSCOW,USSR

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1987年 / 20卷 / 11期

关键词：

D O I：

10.1088/0022-3727/20/11/025

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1519 / 1524

页数：6

共 11 条

[1]

Arzuov M. I., 1978, Soviet Journal of Quantum Electronics, V8, P892, DOI 10.1070/QE1978v008n07ABEH010465

[2]

ARZUOV MI, 1985, POVERHNOST, P130

[3]

BENARD J, 1984, OXYDATION METAUX

[4]

CHENG NW, 1981, J APPL PHYS, V52, P4297

[5] OPTICAL-PROPERTIES OF CVD-COATED TIN, ZRN AND HFN [J].

KARLSSON, B ;

SHIMSHOCK, RP ;

SERAPHIN, BO ;

HAYGARTH, JC .

PHYSICA SCRIPTA, 1982, 25 (06) :775-779

[6] OXIDATION-KINETICS OF ZRN THIN-FILMS [J].

KRUSINELBAUM, L ;

WITTMER, M .

THIN SOLID FILMS, 1983, 107 (01) :111-116

[7]

MATTHEWS A, 1986, J VAC SCI TECHNOL, V3, P2354

[8] NITRIDATION OF TI AND ZR BY MULTIPULSE TEA CO2-LASER IRRADIATION IN LIQUID-NITROGEN [J].

URSU, I ;

MIHAILESCU, IN ;

NANU, L ;

NISTOR, LC ;

POPESCU, M ;

TEODORESCU, VS ;

PROKHOROV, AM ;

KONOV, VI ;

UGLOV, SA ;

RALCHENKO, VG .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (07) :1183-1188

[9] TITANIUM AND ZIRCONIUM NITRIDATION UNDER THE ACTION OF MICROSECOND PULSED TEA CO2-LASER RADIATION IN TECHNICAL NITROGEN [J].

URSU, I ;

MIHAILESCU, IN ;

NISTOR, LC ;

POPA, A ;

POPESCU, M ;

TEODORESCU, VS ;

NANU, L ;

PROKHOROV, AM ;

KONOV, VI ;

TOKAREV, VN ;

UGLOV, SA .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (08) :1693-1700

[10]

URSU I, 1985, J PHYS D, V18, P2447

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