ION-BEAM BONDING OF THIN-FILMS

被引：82

作者：

BAGLIN, JEE

CLARK, GJ

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90488-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：881 / 885

页数：5

共 12 条

[1] BAGLIN JEE, 1984, THIN FILMS INTERFACE, V2, P179
[2] BOTTIGER J, 1984, THIN FILMS INTERFACE, V2, P203
[3] ION-BEAM-ENHANCED ADHESION IN THE ELECTRONIC STOPPING REGION
GRIFFITH, JE
QIU, Y
TOMBRELLO, TA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (2-3): : 607 - 609
[4] THE USE OF FAST HEAVY-IONS TO IMPROVE THIN-FILM ADHESION
JACOBSON, S
JONSSON, B
SUNDQVIST, B
[J]. THIN SOLID FILMS, 1983, 107 (01) : 89 - 98
[5] ENHANCEMENT OF THIN METALLIC FILM ADHESION FOLLOWING VACUUM ULTRAVIOLET-IRRADIATION
MITCHELL, IV
NYBERG, G
ELLIMAN, RG
[J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 137 - 139
[6] THIN-FILM ADHESION CHANGES INDUCED BY ELECTRON-IRRADIATION
MITCHELL, IV
WILLIAMS, JS
SMITH, P
ELLIMAN, RG
[J]. APPLIED PHYSICS LETTERS, 1984, 44 (02) : 193 - 195
[7] MITCHELL IV, 1984, THIN FILMS INTERFACE, V2, P189
[8] SOFIELD CJ, 1984, THIN FILMS INTERFACE, V2, P197
[9] SOOD DK, 1984, P MATER RES SOC, V27, P565
[10] TOMBRELLO TA, 1984, THIN FILMS INTERFACE, V2, P173