OPTICAL FIBER MICROBENDING SENSORS BY MICROMACHINING TECHNIQUES

被引：2

作者：

CHAO, JHC

NEUDECK, GW

机构：

[1] School of Electrical Engineering, Purdue University, Indiana, West Lafayette

来源：

ELECTRONICS LETTERS | 1990年 / 26卷 / 08期

关键词：

Measurement; Optical fibres;

D O I：

10.1049/el:19900334

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A practical tactile sensor using micromachined techniques has been implemented and evaluated. Optical fibres laid on the pedestals of micromachined silicon showed outstanding improvement in sensitivity, mechanical decoupling between fibres and excellent repeatability. The upper cover made from plastic and Cu-Be foils, not only provides a protective membrane to the sensor but also acts as the force concentrator, allowing better force point resolution. © 1990, The Institution of Electrical Engineers. All rights reserved.

引用

页码：513 / 515

页数：3

共 7 条

[1] FABRICATION OF NOVEL 3-DIMENSIONAL MICROSTRUCTURES BY ANISOTROPIC ETCHING OF (100) AND (110) SILICON [J].