COMPARISON OF AES AND XPS ANALYSIS OF THIN PASSIVE FILMS

被引：22

作者：

BAER, DR

PETERSEN, DA

PEDERSON, LR

THOMAS, MT

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期

关键词：

D O I：

10.1116/1.571652

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：957 / 961

页数：5

共 17 条

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[8] ALLOY COMPOSITIONAL PROFILES BY AES, ESCA, AND ION SPUTTERING - AIR-EXPOSED FE1-XPDX FILMS
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[9] QUANTITATIVE-ANALYSIS OF THIN OXIDE-FILMS USING X-RAY PHOTOELECTRON-SPECTROSCOPY AND RASTERED ION-BOMBARDMENT
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ZETARUK, DG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 181 - 185
[10] MCINTYRE NS, 1976, SURFACE ANAL TECHNIQ