REPRODUCIBLE SULFUR DIFFUSION INTO GAAS

被引：23

作者：

MATINO, H ^{[1
]}

机构：

[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES DEV CTR,KOMUKAI TOSHIBA,KAWASAKI,JAPAN

来源：

关键词：

D O I：

10.1016/0038-1101(74)90111-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：35 / &

共 15 条

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[4] DIFFUSION IN COMPOUND SEMICONDUCTORS
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[6] KENDALL DL, 1968, SEMICONDUCTORS SEMIM, V4
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[8] MADELUNG O, 1964, PHYSICS III V COMPOU
[9] GA-P-TE SYSTEM
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (11) : 1161 - &
[10] Ricci J. E., 1951, PHASE RULE HETEROGEN