DAMAGED LAYERS IN ABRADED SILICON SURFACES

被引:13
作者
PUGH, EN
SAMUELS, LE
机构
关键词
D O I
10.1149/1.2426021
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1429 / 1431
页数:3
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