EFFECTS OF ANNEALING AND ELECTROMIGRATION ON SURFACE-MORPHOLOGY OF POLYCRYSTALLINE FILMS

被引：5

作者：

CHANG, CY ^{[1
]}

HUANG, HL ^{[1
]}

机构：

[1] IBM CORP, TUCSON, AZ USA

来源：

关键词：

D O I：

10.1063/1.332384

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2287 / 2294

页数：8

共 22 条

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