INSITU DETERMINATION OF OPTICAL AND ELECTRICAL-PROPERTIES OF THIN-FILMS DURING THEIR DEPOSITION

被引:10
作者
GADENNE, P [1 ]
VUYE, G [1 ]
机构
[1] UNIV PARIS 06, CNRS, OPT SOLIDES LAB, F-75230 PARIS 05, FRANCE
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1977年 / 10卷 / 07期
关键词
D O I
10.1088/0022-3735/10/7/018
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:733 / 736
页数:4
相关论文
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