DEUTERIUM ION IRRADIATION OF SIC AND SI-C-AL-O COMPOUND FILMS ON MOLYBDENUM

被引：4

作者：

KITAJIMA, M

FUKUTOMI, M

OKADA, M

机构：

来源：

THIN SOLID FILMS | 1982年 / 87卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90284-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：297 / 311

页数：15

共 24 条

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