SILICON-NITRIDE COATINGS ON MOLYBDENUM BY RF REACTIVE ION PLATING

被引：18

作者：

FUKUTOMI, M ^{[1
]}

KITAJIMA, M ^{[1
]}

OKADA, M ^{[1
]}

WATANABE, R ^{[1
]}

机构：

[1] NATL RES INST METALS,MEGURO KU,TOKYO,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 09期

关键词：

D O I：

10.1149/1.2133666

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1420 / 1424

页数：5

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