HIGH-RESOLUTION DEPTH ANALYSIS OF HYDROGEN BY A RESONANCE NUCLEAR-REACTION - A-SI/H/SI(001)

被引：7

作者：

FUKUTANI, K

TSUNODA, M

MURATA, Y

YAMASHITA, H

KOMAKI, K

KOBAYASHI, K

机构：

[1] UNIV TOKYO,COLL ARTS & SCI,MEGURO KU,TOKYO 153,JAPAN

[2] UNIV TOKYO,FAC SCI,DEPT PHYS,BUNKYO KU,TOKYO 113,JAPAN

[3] UNIV TOKYO,NUCL SCI & TECHNOL RES CTR,BUNKYO KU,TOKYO 113,JAPAN

来源：

SURFACE SCIENCE | 1993年 / 283卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(93)91017-J

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Hydrogen atoms chemisorbed on and/or embedded under a surface are analyzed by the resonance nuclear reaction of H-1(N-15, alphagamma)C-12. A monochromatized N-15(2+) ion beam at 6.385 MeV is generated from a 5 MV tandem-type Van de Graaff accelerator. The amount of hydrogen is determined by measuring the gamma-ray yield emitted in the nuclear reaction. Hydrogen atoms located at the interface between an amorphous Si layer of 35 angstrom thick and a Si(001) surface are clearly distinguished from those adsorbed on the clean Si(001) surface.

引用

页码：447 / 451

页数：5

共 10 条

[1] HIGH-RESOLUTION TECHNIQUES FOR NUCLEAR-REACTION NARROW RESONANCE WIDTH MEASUREMENTS AND FOR SHALLOW DEPTH PROFILING [J].

AMSEL, G ;

MAUREL, B .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :183-196

[2] HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE [J].

FUJIMOTO, F ;

OOTUKA, A ;

KOMAKI, K ;

IWATA, Y ;

YAMANE, I ;

YAMASHITA, H ;

HASHIMOTO, Y ;

TAWADA, Y ;

NISHIMURA, K ;

OKAMOTO, H ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (07) :810-814

[3] LIFETIME OF AN ADSORBATE-SUBSTRATE VIBRATION - H ON SI(111) [J].

GUYOTSIONNEST, P ;

DUMAS, P ;

CHABAL, YJ ;

HIGASHI, GS .

PHYSICAL REVIEW LETTERS, 1990, 64 (18) :2156-2159

[4] DETECTION OF ADSORBED HYDROGEN ON W(001) BY USING H-1(N-15,ALPHA-GAMMA)C-12 REACTION [J].

IWATA, Y ;

FUJIMOTO, F ;

VILALTA, E ;

OOTUKA, A ;

KOMAKI, K ;

KOBAYASHI, K ;

YAMASHITA, H ;

MURATA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06) :L1026-L1028

[5] HYDROGEN EMBEDDED IN NI - PRODUCTION BY INCIDENT ATOMIC-HYDROGEN AND DETECTION BY HIGH-RESOLUTION ELECTRON-ENERGY LOSS [J].

JOHNSON, AD ;

MAYNARD, KJ ;

DALEY, SP ;

YANG, QY ;

CEYER, ST .

PHYSICAL REVIEW LETTERS, 1991, 67 (07) :927-930

[6] A NEW MEASUREMENT OF THE 429 KEV N-15(P, ALPHA-GAMMA)C-12 RESONANCE - APPLICATIONS OF THE VERY NARROW WIDTH FOUND TO N-15 AND H-1 DEPTH LOCATION .1. RESONANCE WIDTH MEASUREMENT [J].

MAUREL, B ;

AMSEL, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :159-164

[7]

MURATA Y, UNPUB PHYS REV LETT

[8] INFRARED LINEWIDTHS AND VIBRATIONAL LIFETIMES AT SURFACES - H ON SI(100) [J].

TULLY, JC ;

CHABAL, YJ ;

RAGHAVACHARI, K ;

BOWMAN, JM ;

LUCCHESE, RR .

PHYSICAL REVIEW B, 1985, 31 (02) :1184-1186

[9]

Ziegler J.F., 1980, HDB STOPPING CROSS S

[10]

ZINKEALLMANG M, 1986, Z PHYS A, V323, P183

← 1 →