HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE

被引：74

作者：

FUJIMOTO, F

OOTUKA, A

KOMAKI, K

IWATA, Y

YAMANE, I

YAMASHITA, H

HASHIMOTO, Y

TAWADA, Y

NISHIMURA, K

OKAMOTO, H

HAMAKAWA, Y

机构：

[1] UNIV TOKYO,NUCL SCI & TECHNOL RES CTR,BUNKYO KU,TOKYO 113,JAPAN

[2] UNIV TOKYO,FAC SCI,DEPT PHYS,BUNKYO KU,TOKYO 113,JAPAN

[3] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 07期

关键词：

D O I：

10.1143/JJAP.23.810

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：810 / 814

页数：5

共 12 条

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[9] PROPERTIES AND STRUCTURE OF ALPHA-SIC-H FOR HIGH-EFFICIENCY ALPHA-SI SOLAR-CELL [J].

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