NMR AND IR STUDIES ON HYDROGENATED AMORPHOUS SI1-XCX FILMS

被引：76

作者：

NAKAZAWA, K

UEDA, S

KUMEDA, M

MORIMOTO, A

SHIMIZU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1143/JJAP.21.L176

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L176 / L178

页数：3

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