PROTON MAGNETIC-RESONANCE SPECTRA OF PLASMA-DEPOSITED INORGANIC THIN-FILMS

被引：30

作者：

REIMER, JA

VAUGHAN, RW

KNIGHTS, JC

LUJAN, RA

机构：

[1] CALTECH,DIV CHEM & CHEM ENGN,PASADENA,CA 91125

[2] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 01期

关键词：

D O I：

10.1116/1.571016

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：53 / 56

页数：4

共 25 条

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