ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS SILICON-CARBIDE, SILICON-NITRIDE AND GERMANIUM CARBIDE PREPARED BY GLOW-DISCHARGE TECHNIQUE

被引:326
作者
ANDERSON, DA [1 ]
SPEAR, WE [1 ]
机构
[1] UNIV DUNDEE,CARNEGIE LAB PHYS,DUNDEE DD1 4HN,SCOTLAND
来源
PHILOSOPHICAL MAGAZINE | 1977年 / 35卷 / 01期
关键词
D O I
10.1080/14786437708235967
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1 / 16
页数:16
相关论文
共 23 条
[1]   ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON PREPARED BY GLOW-DISCHARGE TECHNIQUE [J].
ANDERSON, DA .
PHILOSOPHICAL MAGAZINE, 1977, 35 (01) :17-26
[2]  
BRODSKY MH, 1972, RC3898 IBM RES REP
[3]   PROPERTIES OF SIXOYNZ FILMS ON SI [J].
BROWN, DM ;
GRAY, PV ;
HEUMANN, FK ;
PHILIPP, HR ;
TAFT, EA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) :311-&
[4]   ELECTRICAL CHARACTERISTICS OF SILICON NITRIDE FILMS PREPARED BY SILANE-AMMONIA REACTION [J].
BROWN, GA ;
ROBINETT.WC ;
CARLSON, HG .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (09) :948-&
[5]   EVIDENCE OF EXCESS SILICON IN REACTIVELY SPUTTERED SILICON NITRIDE FILMS [J].
CORDES, LF .
APPLIED PHYSICS LETTERS, 1967, 11 (12) :383-&
[6]   CONDUCTION IN NON-CRYSTALLINE SYSTEMS .5. CONDUCTIVITY, OPTICAL ABSORPTION AND PHOTOCONDUCTIVITY IN AMORPHOUS SEMICONDUCTORS [J].
DAVIS, EA ;
MOTT, NF .
PHILOSOPHICAL MAGAZINE, 1970, 22 (179) :903-&
[7]  
FAGEN EA, 1973, AMORPHOUS LIQUID SEM, P601
[8]   PHOTOEMISSION OF ELECTRONS AND HOLES INTO SILICON NITRIDE [J].
GOODMAN, AM .
APPLIED PHYSICS LETTERS, 1968, 13 (08) :275-&
[9]   DIRECT EVIDENCE FOR HOMONUCLEAR BONDS IN AMORPHOUS SIC [J].
GORMAN, M ;
SOLIN, SA .
SOLID STATE COMMUNICATIONS, 1974, 15 (04) :761-765
[10]   ELECTRICAL CONDUCTION THROUGH THIN AMORPHOUS SIC FILMS [J].
HARTMAN, TE ;
BLAIR, JC ;
MEAD, CA .
THIN SOLID FILMS, 1968, 2 (1-2) :79-&