NUCLEAR-REACTION ANALYSIS OF HYDROGEN IN AMORPHOUS-SILICON AND SILICON-CARBIDE FILMS

被引：9

作者：

LIGEON, E ^{[1
]}

GUIVARCH, A ^{[1
]}

FONTENILLE, J ^{[1
]}

LECONTELLEC, M ^{[1
]}

DANIELOU, R ^{[1
]}

RICHARD, J ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,CPM PMT,F-22301 LANNION,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 168卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(80)91300-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：499 / 504

页数：6

共 18 条

[1] [Anonymous], COMMUNICATION
[2] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[3] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (11) : 561 - 563
[4] INFLUENCE OF ION-BEAM BOMBARDMENT IN HYDROGEN SURFACE-LAYER ANALYSIS
BUGEAT, JP
LIGEON, E
[J]. NUCLEAR INSTRUMENTS & METHODS, 1979, 159 (01): : 117 - 124
[5] CATHERINE Y, UNPUBLISHED
[6] APPLICATION OF NUCLEAR-REACTIONS FOR QUANTITATIVE HYDROGEN ANALYSIS IN A VARIETY OF DIFFERENT MATERIALS PROBLEMS
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
KOCH, FB
MAGEE, CW
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 9 - 18
[7] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON
FREEMAN, EC
PAUL, W
[J]. PHYSICAL REVIEW B, 1978, 18 (08): : 4288 - 4300
[8] GUIVARCH A, UNPUBLISHED
[9] HYDROGEN CONTENT OF PLASMA-DEPOSITED SILICON-NITRIDE
LANFORD, WA
RAND, MJ
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (04) : 2473 - 2477
[10] LECONTELLEC M, UNPUBLISHED