MORPHOLOGY AND PROPERTIES OF SPUTTERED TIN LAYERS AS A FUNCTION OF SUBSTRATE-TEMPERATURE AND SPUTTERING PRESSURE

被引：10

作者：

KOPACZ, U

JEHN, HA

机构：

来源：

THIN SOLID FILMS | 1985年 / 126卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90320-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：265 / 273

页数：9

共 16 条

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