INFLUENCE OF SUBSTRATE SHAPE ON TIN FILMS PREPARED BY REACTIVE SPUTTERING

被引：31

作者：

JOHANSSON, BO

SUNDGREN, JE

HENTZELL, HTG

KARLSSON, SE

机构：

来源：

THIN SOLID FILMS | 1984年 / 111卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90323-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：313 / 322

页数：10

共 28 条

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