THE EFFECTS OF SUBSTRATE BIAS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF TIN FILMS PREPARED BY REACTIVE RF SPUTTERING

被引：94

作者：

IGASAKI, Y

MITSUHASHI, H

机构：

来源：

THIN SOLID FILMS | 1980年 / 70卷 / 01期

关键词：

D O I：

10.1016/0040-6090(80)90407-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：17 / 25

页数：9

共 13 条

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