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ORDERING OF OXIDE PRECIPITATES IN OXYGEN IMPLANTED SILICON

被引：28
作者：
VANOMMEN, AH
KOEK, BH
VIEGERS, MPA
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 17期
关键词：
D O I：
10.1063/1.97475
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1062 / 1064
页数：3
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