X-RAY REFRACTIVE-INDEX - A TOOL TO DETERMINE THE AVERAGE COMPOSITION IN MULTILAYER STRUCTURES

被引:66
作者
MICELI, PF
NEUMANN, DA
ZABEL, H
机构
[1] Univ of Illinois at, Urbana-Champaign, Urbana, IL, USA, Univ of Illinois at Urbana-Champaign, Urbana, IL, USA
关键词
FILMS; -; X-RAYS; Refraction;
D O I
10.1063/1.96749
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a novel and simple method to determine the average composition of multilayers and superlattices by measuring the x-ray refractive index. Since these modulated structures exhibit Bragg reflections at small angles, by using a triple axis x-ray spectrometer we have accurately determined the peak shifts due to refraction in GaAs/Al//xGa//1//-//xAs and Nb/Ta superlattices. Knowledge of the refractive index provides the average fractional composition of the periodic structure since the refractive index is a superposition of the refractive indices of the atomic constituents. We also present a critical discussion of the method and compare the values of the average fractional composition obtained in this manner to the values obtained from the lattice parameter change in the GaAs/Al//xGa//1//-//xAs superlattices due to the Al.
引用
收藏
页码:24 / 26
页数:3
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