ELECTRON-BEAM FABRICATION AND FOCUSED ION-BEAM INSPECTION OF SUBMICRON STRUCTURED DIFFRACTIVE OPTICAL-ELEMENTS

被引：12

作者：

DIX, C ^{[1
]}

MCKEE, PF ^{[1
]}

THURLOW, AR ^{[1
]}

TOWERS, JR ^{[1
]}

WOOD, DC ^{[1
]}

DAWES, NJ ^{[1
]}

WHITNEY, JT ^{[1
]}

机构：

[1] FEI EUROPE LTD,TWENTYPENCE TOAD,CAMBRIDGE CB4 4PS,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587645

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3708 / 3711

页数：4

共 10 条

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[9]

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