THE INFLUENCE OF THERMAL-DIFFUSION ON LASER-ABLATION OF METAL-FILMS

被引:211
作者
MATTHIAS, E [1 ]
REICHLING, M [1 ]
SIEGEL, J [1 ]
KADING, OW [1 ]
PETZOLDT, S [1 ]
SKURK, H [1 ]
BIZENBERGER, P [1 ]
NESKE, E [1 ]
机构
[1] FRAUNHOFER INST PHYS MESSTECH,D-79100 FREIBURG,GERMANY
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1994年 / 58卷 / 02期
关键词
D O I
10.1007/BF00332169
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Single-shot ablation thresholds of nickel and gold films in the thickness range from 50 nm to 7 mu m have been measured for 14ns laser pulses at 248 nm, using photoacoustic shock wave detection in air. The metal films were deposited on fused silica substrates. The ablation threshold was found to increase linearly with film thickness up to the thermal diffusion length of the film. Beyond this point it remains independent of film thickness. The proportionality between threshold fluence and thickness allows the prediction of ablation thresholds of metal films from the knowledge of their optical properties, evaporation enthalpies and thermal diffusivities. Physically it proves that ablation is driven by the energy density determined by the thermal diffusion length. A simple thermodynamic model describes the data well. Thermal diffusivities, an essential input for this model, were measured using the technique of transient thermal gratings. In addition, the substrate dependence of the ablation threshold was investigated for 150 nm Ni films.
引用
收藏
页码:129 / 136
页数:8
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