METAL-FILM REMOVAL AND PATTERNING USING A XECL LASER

被引：76

作者：

ANDREW, JE

DYER, PE

GREENOUGH, RD

KEY, PH

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 11期

关键词：

D O I：

10.1063/1.94204

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1076 / 1078

页数：3

共 14 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].

ANDREW, JE ;

DYER, PE ;

FORSTER, D ;

KEY, PH .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719

[2]

COHEN MI, 1972, LASER HDB, V2

[3] INSITU CONTROL OF GA(AL)AS MBE LAYERS BY PYROMETRIC INTERFEROMETRY [J].

GROTHE, H ;

BOEBEL, FG .

JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) :1010-1013

[4]

Hodgson J. N., 1970, OPTICAL ABSORPTION D

[5] OPTICAL CONSTANTS OF NOBLE METALS [J].

JOHNSON, PB ;

CHRISTY, RW .

PHYSICAL REVIEW B, 1972, 6 (12) :4370-4379

[6] OPTICAL-CONSTANTS OF TRANSITION-METALS - TI, V, CR, MN, FE, CO, NI, AND PD [J].

JOHNSON, PB ;

CHRISTY, RW .

PHYSICAL REVIEW B, 1974, 9 (12) :5056-5070

[7] OPTICAL PROPERTIES OF LIQUID METALS AT HIGH TEMPERATURES [J].

MILLER, JC .

PHILOSOPHICAL MAGAZINE, 1969, 20 (168) :1115-&

[8] LASER-GENERATED RC-NETWORKS [J].

SAIFI, MA ;

MASOPUST, OT .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1976, 12 (02) :120-125

[9]

Veiko V. P., 1982, Soviet Journal of Quantum Electronics, V12, P1408, DOI 10.1070/QE1982v012n11ABEH006087

[10] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .2. EXPERIMENT [J].

VEIKO, VP ;

METEV, SM ;

STAMENOV, KV ;

KALEV, HA ;

JURKEVITCH, BM ;

KARPMAN, IM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (08) :1571-&

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