PRACTICAL LANGMUIR PROBE MEASUREMENTS IN DEPOSITION PLASMAS

被引：7

作者：

FELTS, J

LOPATA, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574433

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2273 / 2275

页数：3

共 16 条

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[3] MEASUREMENT OF ELECTRON TEMPERATURE AND NUMBER DENSITY IN SHOCK-TUNNEL FLOWS .I. DEVELOPMENT OF FREE-MOLECULAR LANGMUIR PROBES
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[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2639 - &
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[9] Laframboise J. G., 1966, 100 U TOR I AER STUD
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