IMPROVED VOLTAGE MEASUREMENT SYSTEM USING SCANNING ELECTRON-MICROSCOPE

被引:20
作者
TEE, WJ [1 ]
GOPINATH, A [1 ]
机构
[1] UNIV WALES,UNIV COLL N WALES,SCH ELECTR ENGN SCI,BANGOR LL57 2UW,GWYNEDD,WALES
关键词
D O I
10.1063/1.1135024
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:350 / 355
页数:6
相关论文
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[2]   APPLICATIONS OF SCANNING LOW ENERGY ELECTRON PROBE (SLEEP) FOR MOS DEVICE EVALUATION [J].
FLEMMING, JP .
SOLID-STATE ELECTRONICS, 1971, 14 (11) :1061-&
[3]  
HANNAH JM, 1975, THESIS U EDINBURGH
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