SHALLOW PTSI-SI SCHOTTKY-BARRIER CONTACTS FORMED BY A MULTILAYER METALLIZATION TECHNIQUE

被引：14

作者：

TSAUR, BY

SILVERSMITH, DJ

MOUNTAIN, RW

HUNG, LS

LAU, SS

SHENG, TT

机构：

[1] CALTECH,PASADENA,CA 91125

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 08期

关键词：

D O I：

10.1063/1.329428

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5243 / 5246

页数：4

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