A-SIH POSITION-SENSITIVE DETECTOR WITH STRIPED METAL-ELECTRODES

被引：10

作者：

YAMAMOTO, T ^{[1
]}

MURAKAMI, K ^{[1
]}

TAKAYAMA, S ^{[1
]}

ONO, Y ^{[1
]}

机构：

[1] SHIZUOKA UNIV,ELECTR RES INST,HAMAMATSU,SHIZUOKA 432,JAPAN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 30卷 / 03期

关键词：

D O I：

10.1016/0924-4247(92)80119-N

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel dual-axis tetralateral position-sensitive detector (PSD) has been fabricated with a hydrogenated amorphous silicon (a-Si:H) p-i-n structure. The a-Si:H film for a photocurrent generator is formed by a plasma-enhanced chemical vapour deposition (PECVD) method. The PSD has striped metal electrodes formed by a chromium resistive layer on its photosensitive surface. It is confirmed from the experimental data that the PSD has very good linearity with the detected positions for both axes and that it can determine the positions of two or more incident light spots simultaneously if they illuminate different electrode stripes.

引用

页码：193 / 196

页数：4

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