PROFILE MEASURING METHOD BASED ON REFLECTION CHARACTERISTICS AT A CRITICAL ANGLE IN A RIGHT-ANGLE PRISM

被引：4

作者：

MATSUMOTO, T

KITAGAWA, Y

ADACHI, M

MINEMOTO, T

机构：

[1] KANAZAWA UNIV,FAC ENGN,KANAZAWA,ISHIKAWA 920,JAPAN

[2] KOBE UNIV,DEPT INSTRUMENTAT,KOBE 657,JAPAN

来源：

APPLIED OPTICS | 1991年 / 30卷 / 22期

关键词：

PROFILE MEASUREMENT; RIGHT-ANGLE PRISM; CRITICAL ANGLE; TRIANGULATION; LASER;

D O I：

10.1364/AO.30.003205

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new method is proposed for profile measurements using a right-angle prism. With this method, the distance to an object surface is measured by using triangulation based on a change of the critical angle of total reflection. An object surface is illuminated by a scanning laser beam and the incident angle of the scattered light into the prism is measured using the change in the critical angle. Three-dimensional profiles of objects with rough surfaces can be measured with high accuracy.

引用

页码：3205 / 3209

页数：5

共 11 条

[1] TRIANGULATION WITH EXPANDED RANGE OF DEPTH [J].