HIGH-PRECISION OPTICAL-SURFACE SENSOR

被引：75

作者：

KOHNO, T

OZAWA, N

MIYAMOTO, K

MUSHA, T

机构：

[1] MECH ENGN LAB, SAKURA, IBARAKI 305, JAPAN

[2] KOSAKA LAB LTD, MISATO, SAITAMA 341, JAPAN

[3] OLYMPUS OPT CO LTD, HACHIOJI, TOKYO 192, JAPAN

来源：

APPLIED OPTICS | 1988年 / 27卷 / 01期

关键词：

D O I：

10.1364/AO.27.000103

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：103 / 108

页数：6

相关论文

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