STRAINED SRTIO3/BATIO3 SUPERLATTICES FORMED BY LASER-ABLATION TECHNIQUE AND THEIR HIGH DIELECTRIC-PROPERTIES

被引:88
作者
TABATA, H [1 ]
TANAKA, H [1 ]
KAWAI, T [1 ]
OKUYAMA, M [1 ]
机构
[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 2A期
关键词
DIELECTRIC SUPERLATTICE; LASER ABLATION; SRTIO3; FILM; BATIO3; FT-IR;
D O I
10.1143/JJAP.34.544
中图分类号
O59 [应用物理学];
学科分类号
摘要
Artificial dielectric superlattices of SrTiO3/BaTiO3 (STO/BTO) have been formed by a pulsed laser ablation technique with in situ monitoring of reflection high-energy electron diffraction (RHEED) oscillation. The superlattices with a stacking periodicity of a few unit cells show higher dielectric constant than that of (Sr0.5Ba0.5)TiO3 films with change of temperature or applied frequency. The tetragonal structures of the superlattices are maintained at temperatures of more than 200 degrees C owing to a large stress at the interfaces between STO and BTO layers.
引用
收藏
页码:544 / 547
页数:4
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