EFFECT OF A GLASSY MEMBRANE ON SCHOTTKY-BARRIER BETWEEN SILICON AND METALLIC SILICIDES

被引：24

作者：

BENE, RW ^{[1
]}

WALSER, RM ^{[1
]}

机构：

[1] UNIV TEXAS,ELECTR RES CTR,DEPT ELECT ENGN,AUSTIN,TX 78712

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期

关键词：

D O I：

10.1116/1.569332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：925 / 929

页数：5

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