NEW HIGH-EFFICIENCY QUASI-CONTINUOUS OPERATION OF AN ARF(B-]X) EXCIMER LAMP EXCITED BY MICROWAVE-DISCHARGE

被引:47
作者
KUMAGAI, H
OBARA, M
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D O I
10.1063/1.102247
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O59 [应用物理学];
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页码:1583 / 1584
页数:2
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[3]   NEW HIGH-EFFICIENCY QUASI-CONTINUOUS OPERATION OF A KRF(B-]X) EXCIMER LAMP EXCITED BY MICROWAVE-DISCHARGE [J].
KUMAGAI, H ;
OBARA, M .
APPLIED PHYSICS LETTERS, 1989, 54 (26) :2619-2621