HEAT-SHOCK FRACTURING AND REPLICATION FOR THE ELECTRON-MICROSCOPY OF THIN-FILMS

被引:5
作者
MULLER, T [1 ]
EDLINGER, J [1 ]
PULKER, HK [1 ]
机构
[1] BALZERS AG, BASIC RES LAB, FL-9496 BALZERS, LIECHTENSTEIN
关键词
13;
D O I
10.1016/0304-3991(92)90098-5
中图分类号
TH742 [显微镜];
学科分类号
摘要
Pt-C surface replicas were examined by transmission electron microscopy (TEM) to study the structural details of the surfaces and fracture cross sections of single films and multilayer thin film coatings. Manual fracturing caused artifacts in the surface and fracture face of multilayer systems. Single films are less subject to deformation by external mechanical forces in this fracturing process. Heat shock fracturing applied to multilayer systems and single films resulted in relatively smooth and reproducible cross sectional areas. Most fracturing methods will reveal the characteristic film microstructures, but more or less artifactual fracture structures are always superimposed on them. The goal of this investigation was to demonstrate that the new heat shock fracturing method minimises these disturbing artifacts.
引用
收藏
页码:89 / 98
页数:10
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