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ALUMINUM DEPOSITION ON POLYIMIDES - THE EFFECT OF INSITU ION-BOMBARDMENT - COMMENT

被引：9
作者：
STROHMEIER, BR
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 04期
关键词：
D O I：
10.1116/1.576549
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3347 / 3349
页数：3
相关论文
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[7]   ALUMINUM DEPOSITION ON POLYIMIDES - THE EFFECT OF INSITU ION-BOMBARDMENT [J].
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