PHOTOEFFECTS ON THE FLUORINATION OF SILICON .2. KINETICS OF THE INITIAL RESPONSE TO LIGHT

被引：72

作者：

HOULE, FA

机构：

来源：

关键词：

D O I：

10.1063/1.446506

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：4851 / 4858

页数：8

共 17 条

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[6] PHOTOEFFECTS ON THE FLUORINATION OF SILICON .1. INFLUENCE OF DOPING ON STEADY-STATE PHENOMENA
HOULE, FA
[J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (09) : 4237 - 4246
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